Antoine Weill--Duflos
Antoine Weill--Duflos
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NanoNewton Resolution
Modeling and Experimental Characterization of an Active MEMS Based Force Sensor
Active force sensors are based on the principle of force balancing using a feedback control. They allow, unlike passive sensors, the …
Jonathan Cailliez
,
Mokrane Boudaoud
,
Abdenbi Mohand-Ousaid
,
Antoine Weill-Duflos
,
Sinan Haliyo
,
Stéphane Régnier
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