differential comb drive actuation

Modeling and Experimental Characterization of an Active MEMS Based Force Sensor

Active force sensors are based on the principle of force balancing using a feedback control. They allow, unlike passive sensors, the …

Jonathan Cailliez, Mokrane Boudaoud, Abdenbi Mohand-Ousaid, Antoine Weill-Duflos, Sinan Haliyo, Stéphane Régnier